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Thin film Si on TFLN
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Optical grade x-cut LTOI
SiCOI
Er-doped LNOI
MgO-doped LNOI
8inch Thin film LN/LT on Silicon Photonics
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SiC on insulator- SiCOI
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Specification
SiCOI
Structure
SiC/Oxide/Si
Diameter
4inch/6inch
Device-layer
SiC
Thickness
300-700 nm
