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TFLN/LNOI
POI/LTOI
Thin film Si on TFLN
TFLN on custom substrates
Optical grade x-cut LTOI
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High performance micro-acoustic chip material - POI
Specification
POI
Structure
LT/Oxide/Si
Diameter
4inch/6inch/8inch
Piezo-layer
LT, LN
Thickness
200 nm~1μm
